Micro mechanical pressure sensor is the earliest start on micro mechanical products, is also the most mature of the micro mechanical technology, the earliest start of the industrialization of product. From the point of signal detection method, micro mechanical pressure sensor is divided into two categories, pressure resistance and capacitance. In terms of the structure of the sensitive membrane, such as round, square, rectangular, E a variety of structure. At present, the pressure resistance decay mechanical pressure sensor precision can reach 0.05%, o. 01%, the stability of 0.1% / FS, temperature error is 0.0002%, pressure can be up to hundreds of megabytes platinum, overvoltage protection range of the sensor range of more than 20 times, and can perform a wide range of temperature compensation. The current development direction of micro mechanical pressure sensor has the following several aspects.

One is the sensitive element and signal processing, calibration, compensation and micro controller to carry on the monolithic integrated circuit, the development of intelligent micro machinery pressure sensor. The second is to further improve the sensitivity, low range of micro mechanical pressure sensor. This kind of micro pressure sensor is used in the fluctuating wind pressure, flow rate and the seal leakage identification and other fields. Third is to improve the working temperature, the development of high and low temperature micro mechanical pressure sensor. Pressure resistance decay due to mechanical stress sensor p-n junction temperature tolerance limit, can only be used for the working temperature of 120 degrees, but in many areas urgently need to be able to work under high and low temperature normal micro mechanical pressure sensors, such as magnetic boiler, pipe, high temperature and the pressure inside the container, underground pressure and various engine cavity in the body. At present the research on high temperature mechanical pressure microsensor mainly include alloy thin film sputtering micro mechanical pressure sensor, high temperature fiber micro mechanical pressure sensors, such as high capacitance decay mechanical pressure sensor.

The fourth is to develop the resonant decay mechanical pressure sensor. Resonance decay in addition to the mechanical pressure sensor has the advantage that the normal micro mechanical pressure sensor, but also has accurate digital signal output, strong anti-jamming capability, the advantage of high resolution and accuracy of measurement. Silicon resonant declined with the pressure sensor detection means has put electromagnetic electromagnetic excitation vibration picking, electrostatic capacitance and converse piezoelectric vibration picking incentives piezoelectric vibration picking, electric pressure sensitive resistance and thermal vibration picking incentives/light signal of vibration picking. Among them, the electro-thermal excitation/varistor resonant vibration picking decay mechanical pressure sensor are cheap, compatible with industrial IC technology, sensor and signal conditioning circuit can be integrated on a chip, an attractive application prospect. Temperature cross sensitivity of the sensor is larger, we design a temperature compensation function for this compound resonance decay mechanical pressure sensor. Resonators made of on the same silicon micro bridge of resonator and micro cantilever beam resonator, micro resonator and split beam suspension resonant micro bridge materials, same thickness is equal or close, the same process, at the same time, because they can synchronize response to temperature changes. Through the data fusion technology, as liang win min components of micro suspended buttock temperature changes the resonance frequency of the resonator real-time compensation for micro bridge resonance frequency of the resonator cross sensitivity. By the compensation of harmonic decline mechanical temperature cross sensitivity of pressure sensor is reduced to two orders of magnitude. Thermal excitation light signals of resonant vibration picking decay mechanical stress transfer and confused apparatus has the advantages of resistance to electromagnetic interference, explosion-proof, is the resonance vibration picking pressure sensitive resistance the electro-thermal excitation of the beneficial complementarity of the decay of mechanical pressure sensor, but need complex optical systems. Is not easy to realize and high cost.