Now a lot of sensors are toward miniaturization, micro sensors more convenient we installed, but we in the development of micro sensor when how to ensure his / her accuracy is a big problem, by the use of a pressure sensor as an example, many places need miniature pressure sensor, but also need high precision pressure sensor to produce high precision micro pressure sensor is very important.

Micro pressure sensor using piezoelectric unimorph structure, and built-in preamplifier, through the amplifier amplification of weak signal and to achieve impedance transformation, so that the sensor has the characteristics of small range, high sensitivity, anti-interference and good. This kind of sensor has been widely used in pulse, tube wall pressure fluctuations and other small signal detection. But at the same time, it is an urgent need to measure the performance of this type of sensor with a simple and convenient measurement device.

For micro pressure sensor, the sensitivity and linearity are the two most important performance indexes of micro pressure sensors. In order to produce a sensor that can meet the needs of practical application, an effective simulation method is required to explore the sensitivity and linearity of the micro pressure sensor. In the actual study, a finite element analysis (FEA) and path integral simulation method based on the surface stress of the pressure sensor thin film was found. With this method, the accurate estimation of the output value of the sensor under different pressure is realized in the full scale range, and the sensitivity and linearity of the pressure sensor are simulated.

In order to ensure the accuracy of the micro pressure sensor, we need to optimize from all angles, in addition to the above described. In the structure, the structure of the composite beam and the flat membrane are the advantages of the double island structure.