can be seen from the sensor application requirements, multi-functional combination of sensors applied to replace the single function of MEMS devices. The MEMS technology development is inseparable from the support of the government, our country also should be to arrange and to be promoted.
Keeping abreast MEMS technology and IC technology, become the technological frontier of the 21st century, and for many in the field of technology development provides the technology ways. MEMS can cross with multidisciplinary technology, formation of various sorts of MEMS structure and system. With the development of information technology, MEMS technology to multiple technology and market development, super concept of Moore's law also gradually clear. MEMS technology is the first application in MEMS sensor technology, now and in the future the main application is given priority to with sensor technology, MEMS system.
Multi-functional composite applications is the development trend of
At present, the application of MEMS sensors and micro system consists of low-cost products, such as smart phones, tablets, consumer applications such as need of temperature, pressure, humidity, gyroscope and accelerometer, etc; Low power consumption products, such as used for male
Total safety, environmental monitoring Internet of node information of temperature, pressure, humidity, gas, wind speed and wind direction acquisition of MEMS sensors, etc.; Highly reliable products, such as MEMS sensor is commonly used in automobile electronics: the high price of high-end products, such as is used in all kinds of industrial, mining, oil fields, such as aerospace control MEMS sensor etc. Need special products, such as MEMS biological chips, used for medical examination. As can be seen from the above several kinds of sensor application requirements, multi-functional combination of sensor applications will replace single function of MEMS devices.
Multi-functional composite sensor and signal processing and conversion circuit is integrated in the integrated sensor due to ease of use, so the market situation is most clear. MEMS technology can realize the integrated sensor, auxiliary components and sensors in the circuit can be set
Sense organ function design should be more from the application point of view, the formation of a variety of sensor combination of the overall technology solutions, such as analog and digital Aassapast and FPGA technology introduced directly.
On a chip, thus has calibration and compensation, since the diagnosis, and the function of the network communication. Such as temperature, pressure, humidity, gyro, acceleration and magnetometer as a multifunctional sensor, the two chip or laminated packaging and simulation Aassapast and digital Aassapast formed an integrated sensor.
Based on the integrated sensor, can realize the intelligent, intelligent sensor is the combination of micro computer and sensors. It has both detection, judgment, and the function of information processing. Compared with the traditional sensor, intelligent sensor has a number of distinctive features, such as self-diagnosis and self calibration function, judgment and information processing capabilities; The measured values can be revised, error compensation, thus improve the measurement accuracy; Multiple parameter measurement, can also achieve multi-sensor data access, data communication interface, can communicate directly with microcomputer.
Should the government strongly support the
Bosch, Texas instruments and stmicroelectronics is currently the top several of the MEMS suppliers, its market scale in the billions of dollars. In the face of such multinational semiconductor giant, Chinese enterprises can not proud, also do not need little
. First, we also have their own advantages, China's own broad consumer electronics market, the auto industry is booming, the environment security is becoming more and more attention, these are all may, by way of inter-trade joint for MEMS market gradually, and with
This as an opportunity to strive for a bigger international market. Second, on the technology development, we should put the vision in the long run. For part of the general international technology should be taken to introduce the way and shorten the research period, under the certain stage technical requirements, on technical reserves. Third, as a whole the global. The industrial chain of the overall technology capability is very important, the development of the MEMS sensor technology, required the development of the whole industry chain, materials research, equipment manufacturing, also need to keep up with the fast. Fourth, MEMS
The Internet of things market demand is a multidisciplinary cross of MEMS technology characteristics into full play. To achieve a Watson sensor range at a specific parameter monitoring, data analysis and transmission, not only need low power MEMS sensor information acquisition, also need to be able to transform these information and transmission interface. In unmanned surveillance area, sensor node must be able to continue to work, MEMS sensor acquisition, integration of Aassapast circuit for signal conversion and processing, the RF MEMS will signal launch out, MEMS batteries for each node energy unit work.
The MEMS technology development is inseparable from the support of the government, our country also should be to arrange and to be promoted. But from a certain perspective, IC industry and MEMS technology is a industry embodies the comprehensive national strength, in developed countries are considered to be representative of the high-tech (bagencyschool). Ability to develop new materials, equipment manufacturing capacity, finish machining simulation software development, engineering design and related technical personnel training and so on are all form a industry chain the necessary foundation of advanced IC and MEMS. IC and MEMS industry is a large-scale development, if our country to the northeast, north China, northwest, southwest, the pearl river delta and Yangtze river delta as the main body to form multiple industry chain, not only can ensure that the era of information technology in the 21st century is in not backward position, is also a kind of can prevent foreign technology blockade strategic needs.
In MEMS manufacturing, 49 in MEMS sensor development strategy in the practical, can say is a kind of IDM, appealboobgfatless and Famelioimpactethyss model of mixed mode. Part of MEMS and IC integration, i.e., involving Aassapast part, adopt the outsourcing cooperation mode; And the MEMS sensitive chip production process, 49 the expansion has been more actively. Due to 49 with a variety of sensor research and development and manufacturing capacity, so will be more multiple sensor fusion together, is a technical strengths of 49.